Used KLA / TENCOR SL515 #9197021 for sale

KLA / TENCOR SL515 Mask & Wafer Inspection Equipment is a high-throughput defect inspection system that can handle a wide variety of substrates. It can effectively detect tiny defects in a variety of semiconductor processes, such as photomasks, wafers, mask blanks, deposited films, and developed resist lines. The unit features a 200mm to 300mm field of view and uses three imaging technologies, including high resolution optical, fluorescence, and X-ray imaging. KLA SL515 utilizes both brightfield and oblique illumination, which improves defect detection. Its development mode provides an edge-detection feature for recognizing pattern edges and for mask alignment and focus control. The machine includes both parametric and non-parametric analytical tools for verifying data collected from the inspected masks and wafers. It also provides reporting and data storage capabilities that ensure secure communication of quality data between the tool and other engineering and production sites. The asset delivers accurate results in a fraction of the time it typically takes other similarly sized systems. It can detect and measure defects as small as 20 nanometers and recognize features seen in the range of 350 nanometers, which exceeds the standards set for production. It includes tools for defect classification, correlation tracking, defect identification, tracking of defects across multiple wafers, careful feature matching algorithms, and integration with 3rdparty software systems. At the heart of the model is the patented image optimization technology which works to determine the best equipment parameters for each inspection task. This enables the system to accurately detect and classify defects and features by identifying the features that are most important to the inspection process. The unit's sophisticated algorithms then use this information to optimize the image acquisition settings to maximize the defect and feature differentiation capabilities of the machine. In addition, TENCOR SL 515 is easy to integrate with existing infrastructure, software, and process control tools through its comprehensive library of existing APIs and interfaces. The tool features a fast response time and ensures tight process control, making it an ideal option for high-volume semiconductor manufacturing. KLA / TENCOR SL 515 Mask & Wafer Inspection Asset is a reliable and powerful solution for protective and wafer-level defect detection.