Used KLA / TENCOR SP 200 #293608654 for sale
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KLA / TENCOR SP 200 Mask and Wafer Inspection Equipment is a multi-purpose, highly automated system designed for the detection of defects in integrated circuit (IC) masks and wafers. The unit is used for inspection, review and sorting of masks and wafers at different levels from basic wafer scan, to review, to defect analysis. KLA SP 200 machine utilizes a customizable software platform that can be tailored to the specific needs of each application. The tool includes a unique, high-resolution imaging capability that enables the detection of defects as small as 5 nanometers. It also includes a dual beam laser, high precision image processing and non-contact scan head for precise mask alignment and for the accurate, reliable detection of out-of-tolerance chips. The asset can be used for a variety of applications, including die-to-die and die-to-wafer comparison inspections; finding kinked and bridging wires; estimating yield and diagnosis of chip defects, leakage and shorts. The model can be used to improve process control and increase throughput. The equipment features integrated support software and hardware components. The software includes data acquisition and defect review. It can detect a range of defects, including misalignments, tilt effects, bridging, pinching, shorts, mis-formed fiducials, mis-aligned fiducials, missing elements, random defects, chip damage, and non-uniformities in mask or wafer registration or die sizes. It also includes data base access for product specifications, and a variety of automatic programming and simulation tools, as well as software for statistical analysis. The system architecture also includes automated re-work and data analysis capability. The hardware components consist of a dual beam laser in a wafer/mask specific mechanized scanner. This allows for rapid and accurate alignment and scanning of the masks and wafers. TENCOR SP 200 unit also provides a variety of tools to enhance machine performance, including image processing and feature enhancement tools, as well as pattern recognition tool, color image evaluation and advanced algorithms for template matching. With its high-performance imaging and reliable defect detection, SP 200 asset offers excellent value for the money and is an excellent choice for inspection and defect analysis of masks and wafers.
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