Used KLA / TENCOR SP1 Classic #169068 for sale

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ID: 169068
Wafer Size: 8" - 12"
Vintage: 1998
Wafer surface analysis system, 8" and 12" Specifications: Wafer size: 8" open cassette and 12" FOUP configuration Provides sensitivity, repeatability, surface quality measurements and throughput capabilities required for 0.18µm technologies 0.08um Defect Sensitivity on Well-Polished Silicon 95% Capture Defect Map & Histogram with Zoom Micro View Measurement Capability Up to 150 Wafers Per Hour throughput on 200mm Wafers Illumination Source: 30 mW Argon-Ion Laser, 488nm Wavelength Version 3.8 Software Operator Interface: MS Windows NT 4.0 OS TFT Flat Panel Display Parallel Printer Port Operations Manual for KLA SP1 Classic 1998 vintage.
KLA / TENCOR SP1 Classic is a fully-automated mask & wafer inspection equipment that is designed to deliver higher throughput, higher yield and improved defect detection. The system features an advanced detector, optics, and sophisticated algorithms that enable it to achieve high levels of performance. Each unit comes with accessories such as an IR camera and an LED light source with a zoom lens that can be configured for different specifications. KLA SP1 Classic includes a high-resolution CCD sensor with an integrated quad-layer color filter. This allows the machine to detect both vertical and horizontal defects, as well as identify the exact location of defects with extreme accuracy. It also features a high-speed autofocus tool, allowing the asset to detect even the slightest deviation from the required pattern or specification. TENCOR SP 1 CLASSIC has several different user modes, including manual and interactive modes, to allow users to analyze and inspect various types of defect types. The model also comes with a library of predefined analysis routines, including high-quality defect detection routines, that can be used to quickly evaluate and analyze mask defect wafers. SP1 Classic is designed to operate in a dust-free environment, and features a small footprint that allows it to fit into tight spaces. It is equipped with a built-in Thermal Focusing Equipment (TFS), which allows the system to automatically adjust focus and keep the image quality consistent. The unit also includes an Enhanced Imaging Machine (EIS), which significantly increases the resolution and accuracy of the image. The tool is highly efficient and reliable, with a low-cost per wafer and low downtime. The automated defect review process allows users to quickly review and reject mask defects, ensuring that none make it to the manufacturing line. KLA / TENCOR SP 1 CLASSIC also provides comprehensive traceability, allowing users to track wafer and mask data to provide detailed records of tests performed and defects detected. Overall, KLA SP 1 CLASSIC is an excellent mask & wafer inspection asset that can be relied upon to help boost yield and quality in a production setting. With its advanced detector and optics, sophisticated algorithms and automated processes, the model provides a cost-effective and reliable solution for wafer testing and inspection.
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