Used KLA / TENCOR SP1 Classic #293594484 for sale

ID: 293594484
Vintage: 1998
Wafer surface analysis system 1998 vintage.
KLA / TENCOR SP1 Classic is a mask & wafer inspection equipment designed for the semiconductor industry. It is a fully automated inspection platform that uses advanced imaging and optical metrology technology to inspect photomasks and wafers for defects. The system uses two independent channels that enable simultaneous wafer and mask inspection, allowing for a much faster inspection process. KLA SP1 Classic features an advanced imaging unit that utilizes a high-resolution digital CCD camera and advanced optical techniques to image both the wafer and the mask. The machine is designed to detect a wide range of defects ranging from missing dies, process flaws, and pinholes, to sharper features such as line widths and proximity effects. The imaging tool is combined with advanced analysis software to identify and classify defects. The software can also detect complex patterns and shapes to identify more difficult-to-detect features. The asset is equipped with multiple automated stages of sample handling, including a proprietary electrical mapping model that can detect electrical defects. The equipment also includes a conveyor system for automatic sample handling and loading, as well as a comprehensive wafer transport unit for rapid wafer inspection. The integrated motion control machine enables precise, repeatable movements of both the camera and the sample stage, allowing for high levels of accuracy and repeatability. User interface is provided through an intuitive graphical environment that enables easy control over tool parameters and functions, as well as access to detailed asset info and reports. In addition, KLA Remote Service offers remote support and diagnostics for a streamlined user experience. The model is capable of inspecting over 100,000 wafers an hour, making it a powerful and reliable tool for inspecting a broad range of defects. The equipment is also designed to be easily integrated into existing semiconductor processes, making it an ideal choice for a variety of applications. TENCOR SP 1 CLASSIC is the perfect choice for any task that requires fast, accurate, and reliable inspection of both wafers and masks.
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