Used KLA / TENCOR SP1-DLS #9181648 for sale
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KLA / TENCOR SP1-DLS is an advanced mask and wafer inspection equipment that provides high-quality results for process control applications. It is a fully automated, high-precision robotic system that enables cost-effective analysis of semiconductor wafers for defect detection. The unit is designed specifically for controllability and ease of use, making it the ideal choice for wafer inspection labs and process engineers responsible for wafer analysis. The "KLA SP1 DLS" stands for "Scanning Probe 1 - Defect Localization Machine" and consists of the following components: SP1 Scanning Probe - Equipped with a Piezoelectric Scanner, the SP1 scanning probe moves the wafer under the ultra-high-resolution microscopes to inspect defects. It has a maximum sample movement speed of 5 mm/sec, and is capable of detecting small defects that are as small as 0.6 μm. Infrared (IR) Detector - An infrared (IR) detector is used to quickly detect defects on the wafer surface. It has the ability to combine several inspection techniques including infrared reflectance, contrast imaging, edge detection and color-layering. Charged-Coupled Device (CCD) Camera - A high-resolution CCD camera can take high-definition image captures of defects using a 6-inch range. The camera is capable of providing accurate images and detailed analysis of defects. Laser Tool - A laser asset is used to inspect the backside of a wafer to measure the presence of any defects that cannot be seen under the microscopes. It uses advanced laser detection and analysis algorithms to detect and measure tiny defects. Image Capture Model - An image capture equipment is used to store and analyze the high-resolution images that are captured by the CCD camera. The images can be further analyzed using software, and the results can be used to assess and optimize the overall manufacturing process. TENCOR SP 1-DLS system is designed for efficient, reliable and repeatable wafer inspection results. It is equipped with advanced opto-mechanical, electronic and software technology to maximize quality and yield. The unit is designed to meet the stringent demand of the semiconductor industry, and is certified to meet international standards. TENCOR SP 1 DLS machine is highly suitable for agnostic, semiconductor inspection, and process control applications.
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