Used KLA / TENCOR SP1-DLS #9221448 for sale

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ID: 9221448
Wafer Size: 12"
Vintage: 2004
System, 12" Process: Contamination detection Hardware configuration: Main system: Main mini environment platform SMIF System: (2) ASYST IsoPort Handler system: ASYST Axys model 21 robot Options: Bright field Vacuum system (Vacuum chuck) E84: Overhead load system Chamber components: ARGON Laser JDS uni-phase 75mW Chuck vacuum 2004 vintage.
KLA / TENCOR SP1-DLS is a leading-edge mask and wafer inspection equipment designed to optimize inspection and analysis processes. With advanced optics, large field-of-view (FOV) and ultra-high resolution, KLA SP1 DLS provides an automated solution to quickly identify, characterize, and classify surface-related defects on mask and wafer surfaces. The key components of TENCOR SP 1-DLS are its dual Laser Scanners (DLS) featuring Quadray optics, enabling simultaneous top-down scanning, side-view scanning and twodimensional (2D) image analysis. This system captures critical defect information, allowing for a comprehensive inspection and analysis of the mask and wafer surface. To further optimize surface inspection, SP 1-DLS utilizes proprietary advanced algorithms to analyze and classify defects based on shape, size, location, and optical contrast. With this feature, both surface-level and non-visible defects can be identified and classified. TENCOR SP1-DLS also offers comprehensive reporting capabilities, enabling the user to generate high-quality pre-defined or custom reports. These reports detail critical defect information, enabling engineering teams to quickly diagnose, assess, and troubleshoot any applicable mask and wafer defects. KLA SP 1 DLS allows for seamless integration with other software programs and hardware, or a host-based personal computer for data management. This unit is also capable of real-time defect management and automatic notification of worrisome defects. It also offers superior reliability and repeatability, enabling customers to accurately and confidently assess surface-level defects. TENCOR SP1 DLS is an industry-leading solution, providing accurate defect detection and analysis, as well as the speed and efficiency to improve time-to-market. This machine is capable of delivering comprehensive and robust inspection and analysis, eliminating downtime and reducing costs associated with manual inspection and analysis. The wide field-of-view provides the flexibility to inspect a variety of surface defects, while the advanced optics and automated process ensure surface defect accuracy and reliability. KLA / TENCOR SP 1 DLS is the perfect solution for mask and wafer inspection.
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