Used KLA / TENCOR SP1-DLS #9221448 for sale
It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.
Tap to zoom
Sold
ID: 9221448
Wafer Size: 12"
Vintage: 2004
System, 12"
Process: Contamination detection
Hardware configuration:
Main system: Main mini environment platform
SMIF System: (2) ASYST IsoPort
Handler system: ASYST Axys model 21 robot
Options:
Bright field
Vacuum system (Vacuum chuck)
E84: Overhead load system
Chamber components:
ARGON Laser JDS uni-phase 75mW
Chuck vacuum
2004 vintage.
KLA / TENCOR SP1-DLS is a leading-edge mask and wafer inspection equipment designed to optimize inspection and analysis processes. With advanced optics, large field-of-view (FOV) and ultra-high resolution, KLA SP1 DLS provides an automated solution to quickly identify, characterize, and classify surface-related defects on mask and wafer surfaces. The key components of TENCOR SP 1-DLS are its dual Laser Scanners (DLS) featuring Quadray optics, enabling simultaneous top-down scanning, side-view scanning and twodimensional (2D) image analysis. This system captures critical defect information, allowing for a comprehensive inspection and analysis of the mask and wafer surface. To further optimize surface inspection, SP 1-DLS utilizes proprietary advanced algorithms to analyze and classify defects based on shape, size, location, and optical contrast. With this feature, both surface-level and non-visible defects can be identified and classified. TENCOR SP1-DLS also offers comprehensive reporting capabilities, enabling the user to generate high-quality pre-defined or custom reports. These reports detail critical defect information, enabling engineering teams to quickly diagnose, assess, and troubleshoot any applicable mask and wafer defects. KLA SP 1 DLS allows for seamless integration with other software programs and hardware, or a host-based personal computer for data management. This unit is also capable of real-time defect management and automatic notification of worrisome defects. It also offers superior reliability and repeatability, enabling customers to accurately and confidently assess surface-level defects. TENCOR SP1 DLS is an industry-leading solution, providing accurate defect detection and analysis, as well as the speed and efficiency to improve time-to-market. This machine is capable of delivering comprehensive and robust inspection and analysis, eliminating downtime and reducing costs associated with manual inspection and analysis. The wide field-of-view provides the flexibility to inspect a variety of surface defects, while the advanced optics and automated process ensure surface defect accuracy and reliability. KLA / TENCOR SP 1 DLS is the perfect solution for mask and wafer inspection.
There are no reviews yet