Used KLA / TENCOR SP1-DLS #9232641 for sale

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ID: 9232641
Wafer inspection systems ASYST GEN3 Handler (Dual load ports), 12" Parts include: DLS Laser PMT Power supplies Spindle motor (Refurbished) BSC & Wave plate optical assemblies Optics assemblies.
KLA / TENCOR SP1-DLS is a mask and wafer inspection equipment that combines high-precision defect detection with a fast, automated workflow. It is designed to provide fast, accurate, and reliable results to help reduce production costs and increase yield in the semiconductor industry. The system utilizes the latest defect inspection technology, including advanced algorithms and high-speed image processing. This allows the unit to detect, locate, and classify defects quickly, accurately, and reliably. The machine can detect a wide range of both brightfield and darkfield defects, including critical defects, lithography hotspots, and process irregularities. Additionally, the tool offers the flexibility to configure an inspection job using various analysis techniques, including automated focusing, spectral-based imaging, focus tiling for uneven specimens, and contrast-based analysis. This ensures that all relevant defects are accurately identified. KLA SP1 DLS's advanced data analysis capabilities also enable users to isolate and identify suspicious areas, enabling them to quickly diagnose and correct process issues. The systems intuitive user interface allows users to quickly and easily adjust detection parameters without sacrificing accuracy. Additionally, the asset has an embedded statistical analysis package that allows users to compare results between different wafers and process steps. The model is engineered to provide maximum throughput with minimum downtime. The advanced design of the equipment provides the highest throughput for given inspection times, and the wafers are loaded and unloaded in a single step. Additionally, the system is equipped with a multi-rail wafer handling unit that enables simultaneous loading and measurement making it an ideal tool for high-volume production environments. Overall, TENCOR SP 1-DLS is an advanced mask and wafer inspection machine that offers high-precision defect detection, flexible analysis techniques, and fast throughput in a single tool. It is designed to provide reliable results and improve yield in semiconductor manufacturing.
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