Used KLA / TENCOR SP1 Surfscan DLS #9262958 for sale

KLA / TENCOR SP1 Surfscan DLS is a mask and wafer inspection equipment designed for scan and post-development defect inspection. It enables trustworthy and reliable defect detection on wafers with its powerful combination of advanced optical inspection, robust data integrity, and comprehensive evaluation control features. The Surfscan DLS is a powerful tool for semiconductor testing and inspection, providing industry-leading sensitivity, accuracy, and yield performance. The system combines three different inspection strategies: wafer-to-database comparison for flip chip production, compensating for motion when inspecting flat patterns, and the pattern inspector for mask defects. The pattern inspector component provides comprehensive guidance to detect defects with the most reliable and accurate detection algorithms. Furthermore, it can detect defects both during manufacture and post-manufacture. The unit uses an advanced algorithm to detect and classify defects on the wafer. It combines properties such as size, form, intensity, and contrast to accurately classify each defect. The algorithm supports a wide range of defect types including open / short circuits, linear and bridging defects, isolated and clustered defects, and backside defects, among others. The machine offers a variety of measurement capabilities that enable in-depth analysis of each defect. The defect-specific information for each defect can be exported for further analysis or review. Additionally, the user can choose a range of defect-related parameters to effectively analyze the defect. A color-coded topography map with adjustable grid lines allows for easy analysis of layout errors. Finally, the Surfscan DLS is equipped with several features to ensure reliable data analysis and improved workflow. It supports automated proactive deviance notification and a defect tracking tool that enables quick and efficient analysis and replication of defect clusters. Furthermore, the asset includes full integration with other KLA systems, allowing for integration with mask and photomask inspection tools. Overall, KLA SP1 Surfscan DLS is an invaluable tool for profitable and efficient semiconductor inspection. It provides powerful optical inspection, robust data integration, and comprehensive evaluation control functions that offer optimal defect detection and yield performance.