Used KLA / TENCOR SP1-TBI SURFSCAN #9082120 for sale

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ID: 9082120
Inspection system.
KLA / TENCOR SP1-TBI SURFSCAN is a state of the art mask and wafer inspection equipment. It utilizes an advanced two-beam inspection technology, allowing for fast and reliable detection of defects in microchips. The system is capable of inspecting a wide range of features, from line widths to spacing, defects, edge placement errors and other types of irregularities. KLA SP1-TBI SURFSCAN unit is composed of three main components: an optical reader, an intelligent optical detection unit and a pattern recognition engine. The optical reader consists of two ultrafast laser beams, which allow for wide field point measuring of the mask or wafer surface. The detector uses an intelligent sensing unit to gather information about the features of the wafer, such as line widths, spacing, and irregularities. It also provides precise results that are suitable for measurements in both 2- and 3-dimensional space. The pattern recognition engine is responsible for analyzing the data gathered by the optical reader and detector and making decisions based on the information collected. It can perform a variety of tasks, such as identifying line widths, checking for edge placement errors and finding current shorts in the circuit. Furthermore, it can detect new, unseen defects from the provided mask and wafer images. Overall, TENCOR SP1-TBI SURFSCAN is a powerful and reliable mask and wafer inspection machine. It has been designed to deliver fast results, as well as guarantee accuracy and repeatability in inspecting masks and wafers for a variety of applications. With its high sensitivity and detection capabilities, the tool ensures that chips are manufactured with the highest standards of quality and reliability.
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