Used KLA / TENCOR SP1-TBI SURFSCAN #9082121 for sale
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KLA / TENCOR SP1-TBI SURFSCAN is an advanced mask and wafer inspection equipment designed for high-precision semiconductor production. It is a model in the Surfscan range that was first introduced by KLA and was commercially available in 2004. This system is an automated non-destructive inspection unit capable of inspecting and analyzing masks and wafers for defect detection and classification. The detection of defects is facilitated by the machine's dual-source, high-resolution optical imaging. This provides a wide field of view with high contrast images, at the same time as scanning light sensors measure the reflected light intensity in the process. The tool is provided with an integrated wafer chucking mechanism and wail features which ensure accurate and stable wafer placement. All of these factors together make the asset perfect for inspecting different shapes, sizes, and complex topologies of the wafer, while keeping high resolution. One of the main features of KLA SP1-TBI SURFSCAN is its advanced defect classification capability. It uses proprietary software-based algorithms that allow for automated defect categorization into fault types such as line-edge roughness, modulation, trigger, threading and bridging. This automated feature enables inspected mask and wafer designs to be accurately assessed for yield and reliability. TENCOR SP1-TBI SURFSCAN is also capable of reporting image-based process control data, which is extremely important in semiconductor production. This data includes line-width measurement, defect-density, etching non-uniformity, filling, and filling depth. This allows manufacturers to have full control over their production process and gain crucial insight into it. SP1-TBI SURFSCAN is an invaluable tool in ensuring the highest possible quality in the production of semiconductor designs. It is an integrated model that is capable of providing rapid and precise analysis of mask and wafer designs, thus saving time and money for the manufacturer. At the same time, it offers an efficient way to ensure accuracy and reliability in the process, ensuring the top quality of the products produced.
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