Used KLA / TENCOR SP1-TBI SURFSCAN #9217636 for sale

KLA / TENCOR SP1-TBI SURFSCAN mask & wafer inspection equipment is an automated tool that is used for feature level defect inspection of wafers and masks prior to fabrication. This system is designed to meet the eyes-off-and-distant inspection requirements of the semiconductor industry. The Surfscan systems utilize an advanced optical design and proprietary image processing algorithms to accurately detect all types of wafer and mask defects at the feature level. The optical design of the Surfscan unit utilizes two lasers; one for imaging and the other for illumination. Both lasers produce a uniform directionally polarized beam which is then directed to the wafer or mask through a series of optics. This arrangement enables a full 360º scan of the wafer or mask surface, providing a detailed image of defects such as scratches, particles, and pits. The proprietary image processing algorithms of the Surfscan machine allow for accurate inspection of the wafer and mask surfaces with high throughput. The algorithms analyze each pixel of the image produced, using edge detection and subpixel range contrast analysis for differential image analysis. This analysis is used to identify defects with high levels of accuracy. The Surfscan inspection tool also features automatic focus and shear-compensation, which enable accurate defect detection for samples that contain both near and far defects. An integrated wafer-handling asset is available, which enables automatic and manual loading and unloading of samples. The model is capable of inspecting multiple types of materials, including silicon, carbon, nitride, oxide, and hafnium oxide. It is also capable of scanning at up to 15 microns, allowing for precise detection of all types of defects. The Surfscan equipment provides high levels of reliability and accuracy, and is well suited for a wide range of dangerous feature inspection applications. It is also ideal for applications that require low-cost, advanced defect inspection capabilities.