Used KLA / TENCOR SP1-TBI #9163053 for sale

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ID: 9163053
Wafer Size: 8"-12"
Vintage: 2000
Unpatterned surface inspection system, 8"-12" Handler type: Automation-open cassette Notch alignment (1) Port, 8"-12" Currently installed and stored in cleanroom 2000 vintage.
KLA / TENCOR SP1-TBI is a flexibly configured mask and wafer inspection equipment designed for high performance applications. It is based on the proven SP1 platform, using new technologies such as advanced pattern matching algorithms, programmable focusing optics, and a 1600 x 4096 resolution CCD camera. The system is both cost effective and highly scalable, with a high degree of flexibility for users with a range of price-to-performance needs. KLA SP1T-BI is equipped with the latest high speed optics and advanced illumination to meet the needs of the latest mask and wafer inspection applications, including 3D and line/space features. Its powerful pattern matching, image processing, and defect analysis algorithms help produce accurate and reliable results. The unit features advanced automatic focus and exposure control, which automatically adjust focus and lighting settings to ensure optimal results. TENCOR SP1 TBI is designed for ultra-high inspection throughput, with its high-speed indexing, high-speed imaging, and multi-task capabilities. The machine is equipped with a 4th-axis, three-axis stage to inspect multiple areas as well as complex geometrical features. Through its multi-task feature, it allows users to set up jobs to run unattended, while they are busy with other tasks. Besides its powerful features, KLA SP1 TBI comes with a user-friendly interface that provides guidance to the operator. It also includes an intuitive user interface with graphic prompts for inspection parameters and data logging. Additionally, the tool is equipped with a variety of analysis tools, including defect size measurements and copper-to-glass checking. Overall, SP 1-TBI is a reliable and cost-effective choice for high-precision mask and wafer inspection applications. Its high-speed optics, advanced algorithms, intuitive user interface, and flexibility make it an ideal solution for customers looking for a cost-effective and highly scalable solution.
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