Used KLA / TENCOR SP1-TBI #9362764 for sale

KLA / TENCOR SP1-TBI (Surface Performance 1: Translating Beam Inspection) is a piece of mask & wafer inspection equipment developed by KLA Corporation. It is designed to inspect the pattern performance of masks and wafer dies used in the production of semiconductors. KLA SP1T-BI uses a translating beam imaging equipment to deliver a high-accuracy full field inspection in real-time. The system is composed of an x-y-z scanning stages and a two-lens optical unit that allows it to capture surface images of the mask or wafer during inspection. The optical machine is constructed using achromatic lenses, with the upper lens providing higher resolution image capture while the lower lens maintains a wide-angle view. Operating on low-cost video image analysis hardware, the tool offers high-speed inspection and scanning capabilities. TENCOR SP1 TBI is equipped with sophisticated illuminator/detector hardware and allows for both contact and non-contact inspection. It uses Push-broom scanning for parallel beam recognition and CCD cameras for capture, processing and analysis of the images. With the built-in High Dynamic Range imaging, the asset can detect and measure almost any type of pattern variations on the surface of the mask or wafer and produces data-rich pattern performance reports. SP1T-BI also supports on-site defect review and offers enhanced pattern inspection capabilities. It allows for inspection using a variety of imaging techniques, such as Optical Character Recognition (OCR), Laser Image Processing (LIP), Moire, Micro Inspection, Edge Enhancement and Contrast Imaging. In addition, KLA / TENCOR SP1 TBI is a highly reliable model. The advanced inspection algorithms and multiple illumination technique helps ensure that the inspection provides complete and accurate results. The equipment also provides a safe user interface and uses a combination of dedicated sensors and robotics to ensure safe maintenance and operation. With its excellent performance and reliable features, KLA / TENCOR SP1T-BI is an ideal tool for inspection and process development of both masks and wafers. It is a powerful high-end system that offers flexibility, accuracy and reliable data integrity.