Used KLA / TENCOR SP1-TBI #9375895 for sale
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KLA / TENCOR SP1-TBI is a mask and wafer inspection equipment designed to detect defects on circuit patterns of mask films and wafers in the semiconductor industry. The system is composed of an advanced pattern recognition unit for automated and repeatable mask and wafer inspection. KLA SP1T-BI features two separate optical microscopes that enable non-destructive inspection of complex circuit patterns as small as 100 nanometers in size. The microscopes use automated imaging optical systems to capture high-resolution images of circuits, which are then analyzed by an enhanced pattern recognition machine to detect any possible defects. Thanks to its high-resolution imaging technology, TENCOR SP1 TBI is able to detect such defect types as open-shorts, bridging, pinholes, grains, and various types of mask errors. The tool also features advanced defect analysis and sorting capabilities based on defect type, size, location, and physical characteristics. It can also accurately measure defect size and profile in three dimensions. The asset also features an integrated wafer alignment model for rapid wafer loading and scanning. This enables the equipment to inspect a large number of masks and wafers in parallel. It is also capable of separating multiple masks into individual parts for further analysis. KLA / TENCOR SP1 TBI also offers a wide range of quality assurance tools such as quick setup and test runs, automatic calibration, automatic rule adjustment, and data logging capabilities. It is also able to perform both off-line and on-line tests and can be used in both laboratory and production environments. In addition, the system is designed with a low-noise operation and is highly reliable, making it suitable for high throughput production testing. All in all, TENCOR SP 1 TBI mask and wafer inspection unit is a state-of-the-art machine designed to detect defects in complex circuit patterns of mask films and wafers. Thanks to its high-resolution imaging technology, advanced defect analysis and sorting capabilities, integrated wafer alignment tool, and a wide range of quality assurance tools, the asset is suitable for both laboratory and production environments.
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