Used KLA / TENCOR SP1 #293628417 for sale

KLA / TENCOR SP1
ID: 293628417
Wafer Size: 8"
Handler, 8" 4 positions.
KLA / TENCOR SP1 is an advanced mask and wafer inspection equipment designed to function in high-volume industrial environments. KLA SP1 features fast imaging, precise control, and efficient operation in order to maximize throughput and yield. TENCOR SP 1 is designed around KLA patented IR Ergonomics™, a system of hardware and software that maximizes user integration, ergonomics, and alignment capabilities. The unit includes an automated XY stage to accurately position the mask or wafer being inspected and a powerful imaging subsystem. The imaging subsystem contains two lines of cameras, one for each side of the wafer or mask. The four cameras capture images at different magnifications, ranging from low to ultrahigh-resolution. All four cameras' images are simultaneously compared in real-time by the machine's automated pattern-recognition software. TENCOR SP1 is designed for high performance and repeatability. The tool features an interchangeable electro-optical lens asset, which can automatically switch between different magnifications and allow for a range of inspections. In addition, KLA / TENCOR SP 1 utilizes advanced optics-mapping technology to ensure precise alignment. This prevents any off-axis distortion and allows the model to reliably detect defects. Its fast processing enables inspection speeds up to 100 wafers per hour. SP1 is also highly customizable and can be easily integrated into existing manufacturing processes. The equipment can be configured for various inspection needs, including Semicircle, Ellipsoidal, Helical, and Rectangular Pattern Recognition. It includes integrated data analysis tools, so users can quickly interpret the generated images and quickly adjust parameters to match their specific process. KLA SP 1 is an ideal solution for mask and wafer inspection applications with its advanced real-time imaging and precise pattern-recognition capabilities. Its robust design and comprehensive functionality make it a great choice for high-volume production.
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