Used KLA / TENCOR SP1 #9000064 for sale

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KLA / TENCOR SP1
Sold
ID: 9000064
Wafer Size: 12"
Unpatterned bright field inspection system, 12".
KLA / TENCOR SP1 is a high-performance, automated mask and wafer inspection equipment designed to meet the stringent requirements of today's semiconductor manufacturers. The system utilizes advanced optical design, digital image processing and advanced signal analysis to detect defects on both mask and wafer surfaces. KLA SP1 inspects masks and substrates up to 25mm x 25mm in size with an accuracy of 0.05µm feature size. It employs multi-wavelength LED illumination with variable oblique angle at each inspection point, providing a uniform resolution across the field-of-view. The unit also provides advanced signal conditioning and signal analysis functionality that enables detection of critical defects. TENCOR SP 1 integrates an advanced dual-view scanning machine that allows inspection of both wafer surfaces. This combined with an advanced filtering techniques and signal analysis, enables efficient detection of even the smallest defects and micro-pits. The tool features an advanced user interface, with an intuitive graphical menu and easy to use controls. This allows the operator to quickly define inspections set-ups and track inspection results. TENCOR SP1 also provides enhanced status reporting, allowing operators to monitor asset status in real-time. SP 1 uses an advanced nanoscale imaging model that performs high-contrast image detection and analysis. This integrated technology is capable of capturing defects that go undetected by other inspection systems. The equipment is capable of detecting particle contamination, particle dumps, line defects, scratches, and other high-contrast features. The system is powered by a powerful programmable logic controller (PLC) providing superior control over the entirety of the unit, while the machine can be integrated into existing networks and databases to provide automated monitoring and collection of inspection data. KLA / TENCOR SP 1 is an essential tool for semiconductor manufacturers seeking to reduce yield and cost, give their customers higher quality products, and maintain their competitive edge.
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