Used KLA / TENCOR SP1 #9193057 for sale

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ID: 9193057
Wafer Size: 8"-12"
Single open handler, 8"-12".
KLA / TENCOR SP1 is an automated mask and wafer inspection equipment designed for high speed, accuracy and productivity. This advanced system is ideal for a range of semiconductor production and packaging environments. Featuring an automated loading mechanism, KLA SP1 is capable of loading up to eight masks or one wafer. It uses the latest optics and sensitive detectors to inspect each mask or wafer surface in a high resolution pattern. This unit can detect defects in mask or wafer surfaces such as scratches, pits, contaminations, and voids. Its unique CMT tolerance feature can detect systemic defects such as misalignment, misplacement, and pattern deformation. The results are reported in a SPC-style report. TENCOR SP 1 is an open architecture platform that is easy to use and configure. It features an intuitive graphical user interface and a software environment designed for easy scripting and customization. The machine is equipped with a powerful computer tool which provides ample storage and processing capabilities. It also includes an integrated defect review workstation that can analyze defects in three-dimensional perspective. TENCOR SP1 is designed for production environments and incorporates a full range of safety features. Its use of spatial filters and dual-drive optimizes accuracy and throughput. Additionally, its built-in analytics provide real-time defect analysis, allowing operators to exploit the asset's capabilities. Overall, SP 1 is a reliable and powerful model for mask and wafer inspection. Its automation capabilities allows for greater efficiency and accuracy while its comprehensive safety features ensure the highest levels of user protection.
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