Used KLA / TENCOR SP1 #9293262 for sale

KLA / TENCOR SP1 is a mask and wafer inspection equipment used to detect surface defects, such as particles, scratches, or pinholes, on wafers or photomasks. The system is designed with a combination of inline metrology, inspection, and post-inspection review capabilities. It overlays a brightfield illumination with darkfield illumination, providing enhanced contrast and defect detection at a variety of angles to produce the highest sensitivity. The unit employs a double-side, dual-beam laser scan and multiple wavelength LED light sources to ensure complete dimensional uniformity and inspectability. It is equipped with an advanced Inspection/Metrology Processing machine (IMP) that allows users to apply various measurements and inspection modules to their specific process requirements. The patent pending 5x solid-state Laser Scanner uses a twice-around single scan ophthalmic technique to achieve high speed measurement and data accuracy. To further ensure accuracy, KLA SP1 utilizes an automated full-field imaging tool as well as multiple advanced algorithms for defect detection and analysis. It includes advanced image processing and the application of 3D image processing algorithms to enhance defect detection capabilities. Furthermore, the asset incorporates advanced software tools to provide additional value, such as precise locating, sizing, and classification of defects. The highly resilient TENCOR SP 1 features environmental chambers for extreme temperatures, gas and humidity control. It is also designed with a track-mounted, high-amplitude air knife, which removes ultra-fine particles prior to examination. The model is highly efficient, providing convenience and rapid analysis thanks to automated defect review. The 32-load APC module and focused circuit options allow for high productivity and defect analysis on a single wafer. Overall, SP 1 is a state-of-the-art mask and wafer inspection equipment designed to meet the challenging requirements of semiconductor manufacturing. The system provides high accuracy and quality control, due to its advanced processing features, imaging capabilities, and post-inspection review capabilities. It is an invaluable tool in the semiconductor industry for ensuring optimal product quality and processes.