Used KLA / TENCOR SP3 #293645625 for sale

KLA / TENCOR SP3
ID: 293645625
Wafer surface inspection system, parts machine.
KLA / TENCOR SP3 Mask and Wafer Inspection Equipment is a specialized quality control system designed to detect and measure defects on the surfaces of photolithography masks and wafers. This unit is able to accurately and efficiently identify defects on wafer and mask surfaces in a short amount of time. KLA SP-3 utilizes advanced optics, imaging, and laser technologies to detect sub-micron structures and other anomalies. TENCOR SP 3 is equipped with several features that enable it to accurately determine defects and provide information on the type of defect, its size and position. This machine is capable of performing a variety of inspections such as top surface inspection, image decection, spot metrology, overlay metrology, and overlay scatterometer. All these inspections can be used together to provide an enhanced overall image quality of the mask or wafer. In order to ensure accuracy and consistency, SP3 is integrated with an innovative technology called Scanpool. This technology allows precise and uniform scanning of the wafer or mask surface, resulting in highly precise measurements and greater efficiency. Additionally, KLA SP3 is integrated with error correction, focus optimization, automated line sensors, and a suite of advanced image processing algorithms. SP-3 is further capable of performing high-end line analysis with sub-micron focus optimization, error correction, and Z-height. In addition, it can individually measure surface roughness, width, CD, and CD variation for improved defect analysis and characterization. Furthermore, KLA / TENCOR SP 3 isEquipped with an intuitive user interface, and the Control Workstation software allows for easy operation and customization, making it a robust and flexible tool. TENCOR SP3 is a powerful and cost-effective tool that ensures a high level of quality control. It offers reliable, consistent inspections and accuracy, making it an ideal option for quality control applications. It also provides a great value for its cost, allowing industries to benefit from cost savings and improved process control.
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