Used KLA / TENCOR SP3 #293648486 for sale

KLA / TENCOR SP3 Mask & Wafer Inspection Equipment is a state-of-the-art imaging and analytic equipment designed to detect and identify defects in semiconductor masks and wafers. KLA SP-3 is equipped with advanced optics, advanced image processing, and sophisticated measuring software to ensure that every feature is thoroughly inspected and measured. TENCOR SP 3 utilizes proprietary "3D illumination" technology to develop high-resolution images which are then used for accurate defect inspection and measurement. The system is capable of obtaining clear images of the most complex shapes, including those with narrow-spaced lines and tightly coupled spaces. The advanced optics used have a field of view of 52 μm and can detect feature sizes as small as 4 μm. The lighting aspects of the unit include a broad range of LED illumination spectra and high precision targeting of the view area, which allows detailed inspection of features such as line width, dimension, and position. TENCOR SP-3 boasts sophisticated automated measuring software that is capable of both localized and global defect measurements. The machine uses a combination of algorithms and user-defined measurements to predict and detect defect types, such as line width, dimension, and position (LWDP) violations, critical dimension (CD) errors, and conductivity errors. It is also specifically configured to meet circuit design challenges such as capacitance, leakage, and oxide capture. KLA / TENCOR SP-3 tool is extremely user-friendly and easy to operate. It provides a comprehensive and intuitive interface that makes it easy to drive, inspect, measure, and analyze defects and features. The asset is also equipped with a comprehensive knowledge-based approach that enables the user to look up information quickly and easily. SP-3 provides an all-in-one tool for increasing throughput and productivity, while enabling engineers to quickly and accurately detect and measure defects in order to improve semiconductor manufacturing quality and efficiency. The model is also backed by a team of industry-leading customer support engineers that are available to talk through any issues or questions related to the equipment and its features.