Used KLA / TENCOR SP3 #9236215 for sale

KLA / TENCOR SP3 is a mask and wafer inspection equipment designed to provide comprehensive and accurate evaluation of mask and wafer defects, enabling correct and timely corrective action. The system comprises of an optical microscope head, a laser beam and photoelectric detectors to detect and measure defects. The microscope head capabilities include automatic image capture, defect detection and automatic classification. The laser beam is used to detect and identify defects rapidly with high accuracy and the photoelectric detectors provide clear and sharp images of the wafer and masks. The unit produces detailed reports of the wafer or mask defects which include measurement values for flaw size, shape, tilt and depth. The machine is interfaced with a host inspection and metrology systems, enabling real-time management of defect information and analysis. The tool also includes powerful visualization tools which allow easy presentation of defects. This can be used to facilitate analysis and identification of defects and to aid corrective action. The asset is designed to ensure high efficiency and fast turnaround of inspection and analysis with minimal user intervention. The model is also upgradable and features automated calibration, resource and time saving features. KLA SP-3 equipment is capable of operating up to 150 mm wafers and comes with a variety of options, including filters, lenses and enablers suitable for various levels of inspections. Its configurable recipe technology ensures the optimum performance for a wide variety of applications. TENCOR SP 3's advanced programming allows to simulate various conditions and detect all types of defects, from surface cuts to stacked masks. The system comes with built-in intelligence which provides accurate results for high volume wafer inspection, and also ensures high precision for critical and complex defects. KLA SP3 is highly reliable and user-friendly with intuitive navigation and control. It provides a comprehensive suite of defect and wafer analysis solutions, enabling better process control, faster fabrication and improved efficiency.