Used KLA / TENCOR SP3 #9236717 for sale

KLA / TENCOR SP3 is a high-precision mask and wafer inspection equipment built for advanced device manufacturing. Utilizing a bright red LED imaging engine for enhanced results, the system utilizing KLA industry-leading optical metrology, imaging, and analysis technologies to deliver excellent accuracy and speed of recognition. KLA SP-3's layered approach incorporates superior illumination and pixel level resolution with the ability to collect the specific data needed for each application. The unit enables manufacturers to acquire and compare data from multiple levels of measurements to accurately detect and identify wafer and mask patterns. An advanced optical inspection machine, TENCOR SP 3 is designed with a high-speed infrared (IR) laser, advanced optics, light sources, and several image sensors. This design enables this tool to detect defects on both mask and wafer systems while providing superior resolution. The asset has the capability to non-destructively measure and detect defects in both mask and wafer patterns at resolutions as fine as a single light wavelength. Additionally, the model provides sub-nanometer accuracy. The equipment has a modular design that allows users to customize it to their specific application. For example, the system can be used to detect a broad range of defects such as stacking, bridging, shorts, contaminants, pits, scratches, and more. Additionally, KLA SP 3 features a user-friendly software platform with a host of features including a remote access feature and automatic process control optimization to further customize the unit for specific applications. KLA / TENCOR SP 3's features and capabilities make it an ideal solution for superior inspection and characterization of device patterns. With its accurate and efficient solutions, SP 3 is the premier choice for advanced device manufacturing and critical inspection.