Used KLA / TENCOR Spectra CD-XT #293824131 for sale

KLA / TENCOR Spectra CD-XT
ID: 293824131
Wafer Size: 12"
Vintage: 2009
Scatterometry metrology tool, 12" Inline CD and profile measurements 2009 vintage.
KLA / TENCOR Spectra CD-XT is a mask and wafer inspection equipment for advanced semiconductor fabrication. It combines superior edge resolution, 1-2.5 nanometer geometric measurements and ultra-low-noise measurement capability, allowing semiconductor manufacturers to rapidly identify and eliminate defects from their production line, minimizing costs and improving yield and throughput. KLA Spectra CD-XT is designed to inspect a range of substrates - from photomask plates to wafers. It is equipped with an integrated wafer edge detection system and a precision optical measurement unit for detailed defect and use analysis. This means the machine can detect even the smallest defects on both wafers and masks, up to 1 nm, that can affect yield. TENCOR SPECTRA CD XT is optimised with powerful image auto-focus and auto-tune functionalities, allowing users to quickly and accurately inspect both masks and wafers. It also utilizes a high-precision optical tool to focus on scanned particles, enabling the detection of microscopic defects in both products. Additionally, the asset has a large adjustable ultraviolet illumination model and a low noise CCD imager for maintaining optimal resolution, which helps to reduce noise in the overall measurements. The equipment also features advanced defect classification capabilities, which allow the user to differentiate between real and false alarms, thereby optimizing overall yield. Furthermore, it includes powerful visualization software, which simplifies and speeds up defect review and analysis, while monitoring product and process variability. Finally, TENCOR Spectra CD-XT is backed by KLA renowned customer support, which offers excellent service and technical assistance to ensure that the system performs at its best and lasts for a long time. This unit is an ideal choice for any semiconductor manufacturer looking to ensure the highest quality and yield, while making significant cost savings.
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