Used KLA / TENCOR Spectra CD-XTS+ #9263050 for sale

KLA / TENCOR Spectra CD-XTS+ is a wafer testing and metrology equipment designed for semiconductor manufacturers to measure physical parameters on a wafer or die. It takes metrology one step further by providing feedback to the user as the tests are conducted via the user interface, enabling real-time process adjustments during the wafer testing and measurement process. KLA Spectra CD-XTS+ includes several integrated components, such as the electron beam column, the optical sensor, and the software control, to acquire high-resolution images and detailed physical parameters from tested semiconductor features. The beam deflection in the column is controlled by sets of X-Y coordinate control columns and the column is also integrated with a powerful Data Acquisition Processor (DAP) allowing for very fast data capture. The X-Y movements of the column allow for testing of physical parameters on a very small area of the wafer or die surface at high resolution. TENCOR Spectra CD-XTS+ optical system includes a CCD camera, which captures the images of the tested areas before they are sent to the processing unit. The processing unit is made up of a powerful computer running the specialized software algorithms which jig together the acquired raw images into a uniform data map for further analysis. Using this data map, the software can then employ several specialized algorithms to calculate various critical measurements and also establish trends regarding performance over time. This allows for a high level of quality control and detailed analysis into potential process variations or inconsistencies which might otherwise be missed by conventional testing methods. Moreover, Spectra CD-XTS+ includes a dedicated software-driven laser line scanning (LLS) to spatially locate the structures on the wafer as well as capture their detailed physical parameters such as thickness, tilt angle, depth, or distance between structures. Finally, it also includes a fully programmable inspection unit that rapidly identifies and reports any defects, enabling users to take corrective action or initiate process optimization quickly. Overall, KLA / TENCOR Spectra CD-XTS+ is a powerful and versatile wafer testing and metrology machine capable of providing a comprehensive set of detailed physical parameters while incorporating feedback to improve process control. Thanks to its combination of advanced beam control, inspection, and data processing capabilities, KLA Spectra CD-XTS+ is an excellent choice for any semiconductor manufacturing process.