Used KLA / TENCOR STARlight SL3 URSA #9067571 for sale

KLA / TENCOR STARlight SL3 URSA Mask & Wafer Inspection Equipment is an ultra-resolution imaging and analysis system made by the semiconductor equipment manufacturer KLA. This unit is designed for reliable, precise, and high-resolution inspection and analysis of wafers, masks, and other semiconductor components. KLA STARlight SL3 URSA is an enhanced version of the previous STARlight platform and features an improved optical performance. Its optical machine provides a maximum resolution of 0.6 microns, enabling sub-angstrom surface height measurements over large areas. It also has a state-of-the-art illumination tool that provides a high-intensity uniform lighting for improved contrast and reduced noise. The asset features an integrated modular head. This allows for multiple configurations and flexible setups based on the customer's requirements. This modular head also includes an advanced real-time intraspection model with a user-oriented interface. This intraspection equipment can measure a wide range of defects of wafers and masks, and the resulting images can be viewed from different angles. The system's integrated analysis software is user-friendly and easy to use. It is capable of analyzing a variety of structures and masks, such as so-called 'reverse printing' features. The software also allows for the analysis of multi-material imaging systems such as Profilometry and Multilayer inspection from a common database. TENCOR STARlight SL3 URSA also comes with a powerful microscopy unit. It is equipped with a high-power objective lens with a resolution of 0.2 micron, making it suitable for inspecting mask layer interfaces or irregularities. The integrated mask inspection machine is also capable of detecting defects such as particle contamination, digs, and residues, among others. STARlight SL3 URSA is a compact tool that is easy to set up and operate. It features a robust mechanical design, along with a vibration-free platform for reliable operation. It also comes with a range of advanced automation tools, such as automated focus capability, programmable scans, and multiple parameter adjustment. KLA / TENCOR STARlight SL3 URSA is an efficient and cost-effective wafer and mask inspection asset for the semiconductor industry. Its excellent optical performance and powerful software make it a great choice for high-precision inspections. It is reliable and ensures accurate and reliable results.