Used KLA / TENCOR STARlight SL437 #9115268 for sale

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ID: 9115268
Reticle inspection system Missing: (3) Sky boards Currently deinstalled in a cleanroom.
KLA / TENCOR STARlight SL437 is a advanced, high-end mask and wafer inspection equipment designed to perform accurate and reliable images at an exceptional speed. This system utilizes an advanced optical unit with a full range of digital imaging options and powerful image analysis capabilities to ensure the accuracy and reliability of the inspection process. The modular design of the SL437 allows for flexibility for the custom needs of each customer. The machine's imaging capabilities are based on a double-clad laser and 25nm slit aperture optics, enabling it to view the largest field of view for wafer and mask inspection. The imaging sensors on the SL437 are based on an 8 megapixel CMOS full-frame imaging sensor and a 1.8 megapixel 16bit color CCD imaging sensor. With these, the SL437 can perform highly accurate inspections at speed with up to 320 images per second. The advanced image analysis capabilities of the SL437 enable it to detect and localize defects with high reliability. The defect detection algorithms are based on the advanced decision-making analysis of the defects, enabling especially accurate and reliable detections. This tool includes powerful pattern matching capabilities, enabling users to detect defects of a specific category such as bridging or opens with use of prior patterns. The SL437 is designed for multi-shift operations with its scaling capabilities and zero calibration. The scaling setting enables users to automatically adjust the inspection parameters to a variety of type of wafers or masks, ensuring repeatable inspections. Additionally, utilizing a virtual sample approach, users of the SL437 asset can investigate the entire wafer or mask from a single image, enabling fast defection detection processes. KLA STARlight SL437 model delivers high performance and reliability for wafer and mask inspection. Utilizing an advanced optical equipment with digital imaging, this system can perform inspections with up to 320 images per second, easily matching the throughput of modern production facilities. The image analysis algorithms provide for powerful pattern matching and defect localization capabilities. In addition, the SL437 has built-in scaling and virtual sample abilities, enabling users to quickly extend the inspection performance to multi-shift operations.
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