Used KLA / TENCOR Surfscan SP1-TBI #9312074 for sale

KLA / TENCOR Surfscan SP1-TBI is a leading edge mask and wafer inspection equipment designed specifically for advanced semiconductor technology nodes, such as 10 nanometer (nm) and below. The system combines superior defect detection capabilities and industry leading throughput to ensure that the most challenging mask and wafer inspections are possible. The unit is an 'all-in-one' solution that includes the powerful Surfscan scan head, surface mapping microscopes, patented cleaning processes, optical alignment tools, and the control and interface software to maximize performance. The machine provides superior surface imaging and defect detection for the most challenging mask and wafer inspection requirements. The Surfscan scan head is a precision-engineered instrument designed for demanding mask and wafer inspection tasks. It offers high throughput, low latency, and low-noise imaging. It also offers superior resolution, large field-of-view, and automated defect recognition technology. The scan head is capable of scanning and measuring both photomask structures and wafers. The surface mapping microscopes allow detailed review and analysis of test structures on the wafer and photomask. The microscopes offer a large field-of-view and superior magnification that enables quick detection of contamination and defects. The microscope prisms also allow for detailed pattern recognition and image processing to improve defect detection accuracy. The patented cleaning processes allow for the removal of minor defects from the surface of the photomask or wafer without damaging the production pattern. These processes involve precise cleaning techniques and use of advanced bonded materials that work to clean the surface without damaging the features or defacing the overall production pattern. The tool also includes optical alignment tools that are specifically designed to improve the asset's performance. The tools enable precise alignment of the optics to ensure that the model is properly calibrated and optimally aligned for all operations. The control and interface software provide a comprehensive equipment interface that allows the user to control the system and its processes. The interface also provides access to real-time status information and data, giving the user the most detailed and up-to-date information about the unit's performance. KLA Surfscan SP1-TBI is the ultimate mask and wafer inspection machine for the most challenging applications. Featuring a powerful, high-throughput scanner head, microscope prisms, cleaning processes, and control and interface software, the tool is a comprehensive solution that maximizes performance and allows the highest levels of chip yield and quality.