Used KLA / TENCOR Surfscan SP1-TBI #9314253 for sale
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ID: 9314253
Inspection system
ASYST Vacuum handler
Dual FOUP loader, 12"
Vacuum scanstage system
GEM/SECS
Computer:
x86 8 Stepping
AT/AT Compatible
Hard Disk Drive (HDD): 80GB
RAM: 512MB
Operating system: Windows NT
2005 vintage.
KLA / TENCOR Surfscan SP1-TBI is an automated mask and wafer inspection equipment that is used for detecting defects in the photomask and wafer stages of chip manufacturing. KLA Surfscan SP1-TBI provides high-precision and comprehensive measurement solutions that allow users to quickly and accurately detect and analyze defects. The system includes a high-resolution optical unit with an in-line imaging machine that enables ultra-high throughput capabilities for inspecting the smallest defects. This allows users to quickly and accurately detect and analyze defects before reaching the wafer fabrication stage. The tool also includes advanced imaging technology for detailed mask and wafer inspection and analysis, allowing users to identify potential defects early in the process. TENCOR Surfscan SP1-TBI offers a wide range of defect detection capabilities that often surpass the capabilities of other conventional mask inspection systems. It is equipped with advanced technology such as advanced statistical pattern recognition techniques and enhanced pattern search/detection algorithms, to detect hard-to-find defects. It also utilizes advanced defect-detection technologies such as reflected light imaging techniques and advanced beam-deflection scanning techniques for highly accurate detection and resolution. The asset is user-friendly and can be easily integrated into existing mask and wafer inspection systems. It is also fully programmable and customizable to the specific application and needs. This makes the model very efficient and versatile, allowing users to tailor the equipment to their specific inspection requirements. Furthermore, the user interface is intuitive and easy to use, allowing quick operation and setting up of inspection and analysis tasks. Overall, Surfscan SP1-TBI is an advanced automation system that enables users to quickly and accurately detect and analyze defects before reaching the wafer fabrication stage in chip manufacturing. This unit provides comprehensive measurement solutions and advanced imaging technologies, making it an invaluable tool for detecting and analyzing potential defects.
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