Used KLA / TENCOR Surfscan SP2 #293602599 for sale
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ID: 293602599
Vintage: 2005
Inspection system, parts machine
Controller missing
2005 vintage.
KLA / TENCOR Surfscan SP2 is a highly advanced mask and wafer inspection equipment. KLA Surfscan SP2 is a powerful tool for identifying defects at an early stage of the device manufacturing process, enabling corrective action to be taken before more expensive processing takes place. TENCOR SURFSCAN SP 2's advanced imaging technology, illumination, and computationally intense detection and analysis algorithms enable it to detect defects that are too small to see with the naked eye, or may be obscured or hidden by other features. This enables the operator to accurately identify defects, including those that would otherwise be missed by traditional optical, electrical, or acoustic methods. KLA / TENCOR SURFSCAN SP 2 is equipped with an imaging system that uses both brightfield and polarizer imaging techniques to provide the level of detail required for advanced visual inspection. It achieves an image resolution of up to 3.2µm, and provides illustrations that are clear and easy to interpret. In addition, the unit incorporates wafer and mask inspection lights, along with a suite of software tools, that allow the operator to measure, compare and analyze features on either side of the wafer or mask. The SPI algorithms of KLA SURFSCAN SP 2, coupled with a variety of selectable illumination settings, are equipped to help detect edge, corner and line defects of various sizes, including those that may be kinematically blurred. The SPI enables localized image analysis and measurement, while the settings provide the flexibility to adjust the machine to the specific requirements of each device. The wafer and mask inspection process is further enhanced through a variety of automation processes that simplify data collection and analysis. The tool can be set to automatically follow a template format for data analysis and device inspection, including methods for selecting the most suitable sections for examination, for setting the most appropriate inspection settings, and for alerting operators to defects. SURFSCAN SP 2 also facilitates the transfer and storage of data via its online systems, enabling results from multiple devices to be collated and compared quickly. Finally, the asset is completely compatible with industry standard mask and wafer production systems, for easy integration into existing production processes. Overall, Surfscan SP2 is an excellent tool for identifying defects at an early stage of the device manufacturing process. Its advanced imaging technology and accurate defect detection capabilities provide the operator with an invaluable tool for inspecting wafers and masks quickly and efficiently.
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