Used KLA / TENCOR Surfscan SP2 #293603304 for sale

KLA / TENCOR Surfscan SP2 is a state-of-the-art mask & wafer inspection equipment designed to accurately detect defects on semiconductor mask and wafer surfaces. It features industry-leading optics, proprietary algorithms, and high-precision electronics to rapidly identify and measure even the most challenging mask and wafer defects. KLA Surfscan SP2 system combines two complementary detection techniques: Broadband Scanning Imaging (BSI) and Edge Contrast Imaging (ECI). BSI is a high-resolution full-field telecentric imaging technique which captures the entire 2D image of a wafer or mask with microscopic resolution. It provides sensitive detection of defects on small features, allowing precise measurement and identification of patterns with complex backgrounds. ECI focuses on identified defect features by utilizing small vibration and/or lateral motion to precisely measure edge contrast in ultra-small structures. This technique allows precise localization and measurement of individual defects and allows precise quantification of defect type and size. The unit is designed for maximum flexibility and can be configured for a variety of applications, including opto-electronic measurements, CD-SEM and spacer imaging, critical dimension measurements, and defect inspection. The fully automated machine allows a consistent and efficient inspection process, with users able to customize defect detection criteria for a variety of wafer and mask types. TENCOR SURFSCAN SP 2 offers advanced imaging and display capabilities such as high-magnification optical imaging, localized inspection, and automated feature recognition. It offers dynamic defect detection criteria with sophisticated defect recognition algorithms, allowing user to select the most appropriate inspection strategy and customized settings. With automated defect classification, manual review and die-level defect marking, the tool provides an efficient and comprehensive inspection and defect review process. The asset also features a variety of features designed to streamline the defect detection process, such as an automated measurement model with device-level data collection, as well as automated defect tracking and post-inspection analysis. Such features allow users to shorten their inspection cycles and quickly identify potential defects on a wafer or mask. In conclusion, TENCOR Surfscan SP2 is an advanced and versatile inspection equipment designed for those in the semiconductor industry. It offers a variety of features and capabilities that make it ideal for detecting and analyzing tiny mask and wafer defects, allowing users to detect and measure defects on even the most challenging semiconductor surfaces.