Used KLA / TENCOR Surfscan SP2 #293606549 for sale

KLA / TENCOR Surfscan SP2 is an advanced, automated mask and wafer inspection equipment from KLA Corporation. The system is designed to ensure that each step in the fabrication of advanced electronic devices is as close to perfection as possible, providing the utmost in precision for extremely sensitive and intricate components. The core of the unit is its ProTEG software, which uses advanced two-dimensional imaging techniques to detect defects in patterns down to the nanometer level. Its 'multi-channel spectral imaging' (MCSI) technology utilizes multiple spectral bands to detect defects beyond the limits of conventional optical systems. This works in tandem with advanced pattern recognition algorithms to detect the most difficult defects that would otherwise be missed or remain undetected. Using this technology, the SP2 also performs automatic inspection of overlay, critical dimension (CD), and electrical defects. Its patented Darkfield Illumination (DFI) technique ensures the detection of extremely faint and narrow features in circuit patterns. By analyzing conductivity and resistivity, the SP2 can identify potential electrical defects, including bridging, shorting, and open circuits. The SP2 also comes with a variety of wafer inspection and mask inspection capabilities, including ScanEtch Plus (SEP) and Wafer Edge Inspect (WEI). SEP is an integrated multi-substrate allowance for improved processing of critical and non-critical substrates. WEI inspects the wafer's metrology, as well as various types of defects, such as scratches and contamination. Beyond the components, the SP2 comes equipped with a built-in user interface, providing an intuitive control, monitoring, and setup of the machine. The user interface also allows for the customization of masks and wafer inspection strategies within the tool, as well as the integration of a variety of external third-party automation systems. In summary, KLA Surfscan SP2 provides users with a state-of-the-art, automated mask and wafer inspection solution. Its range of innovative features and capabilities make it ideal for a variety of rugged, precision manufacturing environments.