Used KLA / TENCOR Surfscan SP2 #293643757 for sale

KLA / TENCOR Surfscan SP2 is a mask and wafer inspection equipment for measuring critical dimensions across semiconductor substrates. It combines brightfield and darkfield imaging capabilities to provide unparalleled resolution and accuracy. The system features a high resolution optical unit with a variety of magnification options and angles. KLA Surfscan SP2 is capable of imaging samples up to 300 mm in size, ranging from tight line widths to large & complex patterns, and providing the highest level of process monitoring and control. The optics machine in TENCOR SURFSCAN SP 2 is designed to provide the highest degree of accuracy, with an extensive depth of field ensuring sharp imaging even across complex patterns. The high-brightness light source ensures maximum efficiency of signal-to-noise ratio, while an optimized field of view provides outstanding wide-angle illumination of a single field of view, even in uneven topography. This enables the tool to detect small defects or feature measurement errors. The high-speed autofocus asset in Surfscan SP2 easily acquires pictures of features in all depths of the sample, including tight line patterns, vias, and contact holes, for maximum accuracy. The model features several point-and-click tool sets, ensuring customers can accommodate any substrate surfaces without manual adjustments. In addition, SURFSCAN SP 2 offers enhanced productivity with fast image acquisition speeds and a smart template-based workflow. KLA / TENCOR SURFSCAN SP 2 enables accurate CD (Critical Dimension) measurement with its ultra-high resolution optical equipment. The system's advanced imaging capabilities, such as multiple image stacks, time-lapse imaging and far-field imaging, provide accurate gap measurement and can detect even the finest CD violations. Using the comprehensive analysis capabilities, in addition to the automated defect detection and identification engine, users can maintain the highest standards of quality and process control. TENCOR Surfscan SP2 is designed to be user friendly and is customizable to meet specific customer needs. It can be integrated into any existing tool chain and its advanced image analysis capabilities provide a complete solution for mask and wafer inspection. It features a simple, intuitive interface and user-defined automated processes for rapid task execution. KLA SURFSCAN SP 2 is an ideal mask and wafer inspection unit for reducing production flaws and increasing cost savings.