Used KLA / TENCOR Surfscan SP2 #293769272 for sale

KLA / TENCOR Surfscan SP2 is a mask and wafer inspection equipment used to detect microscopic defects that may compromise the electrical performance of integrated circuits. This advanced system uses sophisticated optics to visually inspect the entire surface of the mask or wafer, searching for defects with the highest resolution possible. KLA Surfscan SP2 is equipped with a comprehensive suite of inspection technologies. This includes optical defect detection, critical dimension scanning, and reticle residue detections, as well as connectivity detection. It features an inspection speed of up to 15 wafers per hour, and provides accurate data at resolutions up to 0.0014 microns. The SP2 unit utilizes a sophisticated objective lens with an innovative five-position mechanism that eliminates image distortion. It is also equipped with a multi-dimensional selectable alpha numeric capability to quickly and accurately identify and reject contaminated or scratched wafers. TENCOR SURFSCAN SP 2 includes an easy-to-use graphical user interface, allowing operators to quickly select parameters and customize the machine for each job. Automation features also simplify operation, reducing the time spent on set-up and reducing potential for human error. The detailed data produced by the tool can be imported into the optional SurfStat data analysis package, allowing users to quickly and accurately identify and troubleshoot microscopic defects. This asset is highly accurate and flexible, making it ideal for quality control and other process management applications. KLA / TENCOR SURFSCAN SP 2 is a highly advanced technology for mask and wafer inspection, making it a go-to choice for the most demanding applications. Outstanding visibility and resolution, combined with ease of operation and data management makes the model an ideal tool for defect analysis and preventative maintenance.