Used KLA / TENCOR Surfscan SP2 #293807608 for sale

ID: 293807608
Inspection system Throughput: <37 nm UV Laser Modes: Standard throughput High sensitivity Oblique illumination Equipped with powder coat painted panel PHOENIX Dual FIMS Vacuum wafer handler, 12" Power inlet Optical filter XY Coordinates Edge exclusion, 2 mm IDM 4-Color light tower (Red, Yellow, Green, Blue) XY Calibration wafer, 12" Dryer Operating system: Windows XP.
KLA / TENCOR Surfscan SP2 is a mask and wafer inspection equipment designed specifically for the wafer fabrication and semiconductor device manufacturing processes. This advanced system allows manufacturers to critically inspect masks and wafers at high throughput rates and detect microscopic defects during wafer fabrication or device manufacturing. KLA Surfscan SP2 features bright-field and dark-field imaging technologies, enabling it to detect even the tiniest of defects present on the wafers. These defects can range from pinholes, scratches and particles to protrusions, marks and distortions. Additionally, the unit can detect other irregularities on the wafers like foreign material accumulation, stains and regions of pre-etch damage. The machine also includes a specialized image analysis feature that allows manufacturers to identify and classify the detected defects with a high level of accuracy. TENCOR SURFSCAN SP 2 is equipped with an intuitive user-interface to make it easier for operators to manage operations. The device has a large 21-inch HD touchscreen panel, which is designed to help users easily configure the inspection parameters. The contact position accuracy of the tool is very good, with a resolution of 0.5 μm, making it suitable for inspecting even the smallest die sizes. TENCOR Surfscan SP2 is also very reliable, as it is equipped with the latest power saving technology. The asset achieves this by automatically powering-down to a standby state after use and then restarting only when necessary. This helps manufacturers to reduce energy costs and also extends the life of the model. The equipment is also designed for a wide range of applications and is compliant with SEMI quality system standards. Surfscan SP2 is an ideal choice for manufacturers looking to inspect their wafers and masks with an high level of accuracy and also to reduce energy consumption while doing so. The unit's high performance makes it an ideal choice for manufacturers looking for a reliable and efficient machine to inspect their wafers and masks.
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