Used KLA / TENCOR Surfscan SP2 #9260809 for sale
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ID: 9260809
Inspection system, 12"
Missing parts:
Qty / Part number / Description
(1) / 0235019-000 / Laser head, UV, 355 nm, 350 mW, T sesam mo
(1) / 0094103-001 / FRU, DC Module assembly, PDU, SP2
(1) / 0261763-000 / Module, data acquisition, USB, MINILAB Ribbon
(1) / 0354464-000 / PCB Assembly PHX E84 4-ports
(1) / 0501328-000 / Front end controller kit
(1) / 0305125-000 / KIT, REV E Controller and cables, YASKAWA NXC100
(1) / 0259855-000 / FRU, L1A, L1B L1-L2 Assembly, EC, SP2
(1) / 0253452-002 / FRU, Attenuator assembly half-wave, EC, SP2
(1) / 0253457-000 / FRU, Fold mirror, 90°, incident, EC, SP2
(1) / 0333668-000 / PS With diode, UV Laser, J40 355 mW hybrid
(1) / 0253311-000 / Assembly, SERVO Mirror, SAPPHIRE, BSS, EC, SP2
(1) / 0216827-000 / PCB Assembly, GALIL M, configured, SP2
(2) / 0094104-000 / FRU, PCB Assembly, proc 3, INTRF 2, 8 x 512M, SP2
(2) / 0202919-002 / FRU, HD and Carrier, IDE 500GB configuration 1.0, SP
(2) / 0253456-000 / FRU, Mirror, Pick-Off, QC1, EC, SP2
(1) / 0023892-000 / Chuck, 8"/12", vacuum, SP1
(1) / 0123546-000 / Fan filter HI capacity, SP2
(1) / 0214551-001 / FRU, PMT Assembly, single, dark field, SP2
(1) / 0094100-000 / FRU, Assembly, fast laser shutter, SP2
(1) / 0214544-001 / FRU, Shutter assembly, laser, beam steering, SP2
(1) / 0253458-001 / FRU, Rotator assembly, half-wave, EC, SP2
(1) / 0253755-001 / FRU, BSC Assembly, NRML/OBL CHNL, EC, SP2
(1) / 0065575-000 / CBL, MTR DR Board to MSK CH Distribution board
(1) / 0128468-000 / Assembly, NODE, CPU, ISO port
(1) / 0354464-000 / PCB Assembly PHX E84 4-Ports
2004 vintage.
KLA / TENCOR Surfscan SP2 is a fully featured, automated mask and wafer inspection equipment. It can perform a variety of different types of mask and wafer inspection, including defect inspection and qualification. The system is capable of inspecting a wide range of wafer sizes, from die to full wafer. It is designed to be both flexible and scalable, allowing users to customize the unit to their exact needs. KLA Surfscan SP2 utilizes KLA proprietary Brightfield, Darkfield, and Contrast Inspection technologies to achieve the highest level of defect detection available today. This advanced technology allows the machine to detect defects as small as 0.1um. The tool offers a choice of various contrast modes, enabling it to distinguish between different defect types as well as identify weakly patterned areas. The asset operates using two CCDs; a 5.6 megapixel field camera and a 1280x800 megapixel wafer camera. The field camera is used to inspect the mask while the wafer camera is used to inspect the wafer. The combination of the two CCDs, along with TENCOR proprietary inspection algorithms, allows the model to quickly and accurately detect defects across the entire wafer. TENCOR SURFSCAN SP 2 is also equipped with a wafer blue alignment equipment that ensures that the wafer and mask are accurately aligned during the inspection process. Additionally, the system features adjustable inspection parameters, allowing users to tailor the inspection to suit their specific needs. KLA / TENCOR SURFSCAN SP 2 also offers on-board data capture capabilities. This allows users to capture and review inspection data for further analysis. In addition, the unit has a high speed processing machine that enables the tool to process data at up to 5x faster than competitive systems. Surfscan SP2 is an advanced, automated mask and wafer inspection asset that offers powerful capabilities for mask and wafer defect detection and qualification. With its 5.6 megapixel field camera, 1280x800 megapixel wafer camera, adjustable inspection parameters, and on-board data capture capabilities, it provides an unparalleled level of flexibility and performance. TENCOR Surfscan SP2 is the ideal model for high-volume, high-yield defect inspection.
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