Used KLA / TENCOR Surfscan SP2 #9314791 for sale
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ID: 9314791
Wafer Size: 12"
Inspection system, 12"
Scan module
Blower
Processor: 2.2 GHz
Operating system: Windows XP
Oblique incident
Edge cut: 2 mm
STD Throughput
Enhanced XY Co-ordinate
Defect classification: Slipline, Scratch and LPD-N
Haze normalization
Haze analysis
Optical filter
Space filter: 20°
Space filter: 40°
Space filter rough film
Options:
Part number / Description
0088725-000 / Normal incident
0088727-000 / High sensitivity mode
0088727800 / High throughput mode
0088732-000 / GEM/SECS
0088733-000 / HSMS
0088731-000 / NFS Client
0088737-000 / E84 Automation support, 12"
0088738-000 / E87 Automation support, 12"
0088739-000 / E40/E94/E90 Automation support, 12"
0088748-000 / LPD-E/S Classification
0088749-000 / Grading / Sorting
0088740-000 / Printer
J00012 / Printer rack
- / BSIM
- / Pato-light
Wafer thickness:
0.725 mm, 8"
0.775 mm, 12"
Sensitivity:
High sensitivity:
Oblique:
Wide: 37 nm
Narrow: 60 nm
Normal:
Wide: 61 nm
Narrow: 78 nm
STD Sensitivity:
Oblique:
Wide: 42 nm
Narrow: 70 nm
Normal:
Wide: 68 nm
Narrow: 83 nm
High throughput:
Oblique:
Wide: 47 nm
Narrow: 80 nm
Normal:
Wide: 72 nm
Narrow: 93 nm
Throughput:
High sensitivity mode:
Edge handling dual FIMS: 15 WPH
Vacuum chuck dual FIMS/Open: 24 WPH
Vacuum chuck 8": 40 WPH
Edge handling 4 x 8": 32 WPH
STD Mode:
Edge handling Dual FIMS: 30 WPH
Vacuum chuck Dual FIMS/Open: 49 WPH
Vacuum chuck, 8": 68 WPH
Edge handling 4 x 8": 55 WPH
High throughput mode:
Edge handling dual FIMS: 58 WPH
Vacuum chuck dual FIMS/Open: 75 WPH
Vacuum chuck, 8": 90 WPH
Edge handling 4 x 8": 80 WPH
Lighting smooth
DPSS Laser : 350 mW, 355 nm
Vacuum:
Scan module
Pressure: -24 ~ -30 Hg
Flow: 1 SCFM
FOUP Opener (Dual FIMS):
Pressure: -24 to -24 Hg
Flow: 1 SCFM
Compressed air:
Scan module
Pressure: 85-105 psi
Flow: 4 SCFM
Condensation: -29°
Edge end effecter:
Pressure: 90~120 psi
Wafer handling:
Edge handling
Vacuum chuck
Data output:
High resolution TFT color flat panel display
USB
Parallel port
Serial port
DVD+RW Drive
Floppy Disk Drive (FDD), 3.5"
Network connector: 10/100 Base-T
ISDN Connector
Voltage: AC 200 V±10%
Frequency: 50-60 Hz ± 5%
Power supply: 200 V, Single phase, 2.88 kVA.
KLA / TENCOR Surfscan SP2 is a highly-advanced mask and wafer inspection equipment used to ensure quality and consistency in the production of semiconductor chips. The system uses a bright laser illumination source with a high-resolution image detection unit to capture images of features on wafers, masks, and reticles at levels of resolution unseen in previous systems. KLA Surfscan SP2 measures to tolerances of 0.5 microns on the most complex reticles to ensure the highest accuracy and precision, and it can inspect feature sizes beyond those of conventional optical inspection systems. The machine uses a patented "laser-plus-shutter" technique to acquire clear images of the smallest features on the mask or wafer within a desired field of view, and its dynamic-lens tool allow the user to magnify resolution up to x128. Additionally, the asset's advanced high-sensitivity image processing technology is able to obtain highly accurate images of all field sizes up to 55 decibels. TENCOR SURFSCAN SP 2 is designed with easy operation in mind, with user-friendly interface and intuitive graphical controls that allow for simple setup and operation. It is equipped with a Feedback (FB) algorithm for fast and accurate defect isolation, and a patented defect isolation technique for difficult defects, such as traditional 'print-through' and 'scratches'. For user convenience, the model is bundled with a suite of software tools with the capability of generating reports of scan data in various file formats, including txt, csv, and html files. KLA SURFSCAN SP 2 is a compact, completely automated equipment that is field-upgradable and requires minimal service support, making it an ideal inspection choice for critical masking and wafer inspection needs. It is designed for quality-critical, high-volume production environments, and its efficient combination of software and hardware provides the highest levels of accuracy, reliability, and speed.
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