Used KLA / TENCOR Surfscan SP3 #293619782 for sale

KLA / TENCOR Surfscan SP3 is a top-of-the-line automated mask and wafer inspection equipment. It is designed to reduce defect detection times and integrated into the manufacturing process in order to prevent defects from being sent to production. The system is equipped with a wide-angle high-resolution camera that provides a full-field view of the mask or wafer. It combines with an automated high-speed stepper to accurately scan each area of the workpiece. The camera takes multiple images of each area, analyzing them for defects and tracking the results in the unit's database. The software algorithms compare against known defects and provide a real-time inspection report. The SP3 machine includes a patented beam inspection technology which can detect nano-scale defects as small as 15 nanometers. This technology magnifies the image of the mask or wafer to allow for a more detailed inspection and increases the accuracy of the results. The tool also offers flexible defect classification settings, allowing the user to set up their own defect classification criteria such as defect size, orientation, and the combination of different types of defects. The asset is equipped with an intuitive graphical user interface which provides quick access to the software settings, allowing the user to quickly adjust settings as needed. It also offers automatic calibration and calibration verification to reduce inspection time and ensure accuracy. The model is compliant with various protocols such as EUV, OPC, IR/NIR, and SARBD. KLA Surfscan SP3 equipment is designed to meet various industry standards such as SEMI, ITRS and EUV, making it suitable for production of semiconductor devices and opto-electronic components. The system is easy to maintain, enabling rapid maintenance and repairs in order to keep production running smoothly. The unit is backed by highly experienced technical support staff and can provide real-time assistance as needed.