Used KLA / TENCOR Surfscan SP3 #9364671 for sale

KLA / TENCOR Surfscan SP3 is a mask and wafer inspection equipment designed for the automated inspection of semiconductor circuits. The system incorporates advanced optical metrology, defect recognize, and defect classification capabilities in its automated mask and wafer inspection workflow. The optical defect review process utilizes several imaging techniques, including laser microscopy, laser scatterometry, and chemical etch, in combination with advanced automated algorithm techniques to accurately identify defects and properly classify them. The unit has a high capacity, enabling it to inspect up to 40,000 wafer die per hour. The machine also provides a comprehensive range of image review and classification functions. These functions allow users to review high-resolution images of defects and classify them based on size, shape, location, and other characteristics, allowing operators to quickly identify defects and determine how to address them. An integrated defect classification engine is also included, allowing operators to automatically assign defect classes. The tool is built on a high-performance FPGA platform and is compatible with several different industry-standard defect databases. It has a large range of advanced features that enable users to customize the inspection process to their specific needs. The asset is designed to reduce false alarms and to provide accurate results in a timely manner. From a safety perspective, KLA Surfscan SP3 model is designed to meet the latest safety regulations, including the European Union's RoHS and WEEE directives. The equipment has been certified for compliance with applicable safety regulations, and is backed by a full, seven-year product warranty. Overall, TENCOR Surfscan SP3 is an advanced mask and wafer inspection system that combines optical metrology, defect recognition, and defect classification capabilities in an automated, high-performance platform. With its comprehensive range of features, the unit can be used to quickly and accurately identify defects and classify them for the most efficient repair and avoidance processes.