Used KLA / TENCOR Surfscan SP3 #9383537 for sale

KLA / TENCOR Surfscan SP3 is an automated wafer and mask inspection equipment designed to increase the throughput of the entire semiconductor manufacturing process. The system offers advanced features to maximize wafer throughput, minimize yield loss, and provide unprecedented accuracy and precision. KLA Surfscan SP3 utilizes Adaptive Intrafield Autofocus and high definition image capture technology to achieve unprecedented accuracy and repeatability for area-to-edge scanning. Utilizing high-end optics and a motorized stage, TENCOR Surfscan SP3 can continuously capture multiple images per field of view over the entire mask or wafer. Using proprietary sub-pixel focusing algorithms, the unit can easily switch between multiple fields of view without ever having to re-focus. The scanning abilities are further leveraged to enable fast and accurate defect detection and classification with machine's Hybrid Reconfirmation function. In addition to the advanced imaging and scanning capabilities, Surfscan SP3's Multi-stage Edge Verification feature allows for detailed edge detection and measurement. By analyzing multiple images, the tool matches patterns for an increased accuracy when detecting missing resist patterns or wafer overlays. KLA / TENCOR Surfscan SP3 reduces the potential for errors in critical size measurement with its high-resolution positioning and fiducial mark detection. This feature utilizes a Penta Prism Table to accurately and precisely move the wafer from left to right and top to bottom, allowing for exact wafer-to-wafer registration and scanning. Additionally, KLA Surfscan SP3's Intelligent Defect Mapping allows for increased wafer throughput, as it can rapidly distinguish and classify defects. Due to the advanced features and capabilities, TENCOR Surfscan SP3 is the first asset of its kind to provide complete defect detection capability, from area-to-edge scanning to size discrimination. With such an innovative and reliable model, semiconductor manufacturers can easily minimize process variability, reduce throughput bottlenecks, and save costs.