Used KLA / TENCOR Surfscan SP3 #9396622 for sale

KLA / TENCOR Surfscan SP3 is a mask and wafer inspection system designed to detect and measure defects on semiconductor and non-semiconductor substrates. Using a combination of sophisticated image acquisition and analytics, KLA Surfscan SP3 can inspect up to four samples of any type with a single action, ensuring customers can obtain fast and accurate defect data. The core of the device is its optical subsystem, which includes two sophisticated cameras—an ultra-high-resolution color CCD for precise planar imaging and a 5x high-resolution grayscale CCD for more selective scanning. Integrated lighting provides natural illumination for consistent results, and a range of automated and manual image manipulation options allow the user to quickly adjust image settings as needed. TENCOR Surfscan SP3 is also equipped with a low-background system for light-sensitive samples, such as microscopy specimens, as well as a field-of-view finder for automated image capture and location of the sample in the field of view. Automated sample morphology manipulation rounds out the device's features as a comprehensive tool for imaging and inspection. On the data side, Surfscan SP3 uses a powerful software engine to provide complex image analysis options. Measurement data can be aggregated and sorted into multiple frameworks, or algorithms can be employed to search for specific particle features or to identify individual defects at the nanometer level. Additionally, the software can be used to archive images locally or remotely for further review and analysis. The versatility of KLA / TENCOR Surfscan SP3 makes it one of the most dependable tools available—ideal for detecting, measuring, and analyzing defects on a wide range of mask and wafer substrates. It offers precision, accuracy, and usability, making it the leading choice for defect detection in the semiconductor industry.