Used KLA / TENCOR Terascan SL516-T5 #9276280 for sale

KLA / TENCOR Terascan SL516-T5 is a next-generation mask and wafer inspection equipment that provides highly accurate and reliable inspection results. It can be used to evaluate the integrity of both wafer and mask lithography processes. The system is equipped with lenses that are engineered to offer quick and precise alignment, featuring 0.17 micron resolution and a low numerical aperture (NA) value of 0.80. An automated alignment mechanism ensures that the lens and stage are perfectly aligned and provides an extremely accurate overview of the wafer or mask. For users requiring increased accuracy, an optional higher NA of up to 1.2 is available. KLA Terascan SL516-T5 integrates the latest in metrology technology to enable rapid inspection speeds. Scan speeds are up to 60X faster than predecessor systems, which result in much faster overall throughput. The unit comes with a choice of manual, semi-automated, or fully automated inspection capabilities. Automated techniques allow for easy calibration and setup to enable automated scanning of up to two wafers at a time. Manual inspection allows users to perform detailed and highly specific inspections, which are particularly useful for finding rare defects. Overall, TENCOR Terascan SL516-T5 provides a comprehensive and cost-effective wafer and mask inspection machine, which is suited to a variety of lithography processes. Its quick and precise alignment mechanism and automated capabilities enable rapid and accurate inspection, making it a great choice for users of all levels looking for a fast and reliable inspection tool.