Used KLA / TENCOR Theta stage assemblies for 2139 #293650349 for sale

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ID: 293650349
Part number: 0219671-000.
KLA / TENCOR Theta stage assemblies for 2139 are a mask and wafer inspection equipment designed to improve the optical quality and repeatability of the inspection process. The system makes use of an automated stage assembly with a variety of high-end optical components including lenses, cameras, and illuminators. This unit offers high-speed image capture at 30 frames per second, allowing for quality defect inspection and analysis. This advanced machine offers the highest quality imaging, providing maximum accuracy in defect detection. The Theta stage assembly utilizes highly efficient illumination and lenses to obtain clear images for analysis. The three-axis motion of the tool provides an exceptionally repeatable pattern of motion for measuring and inspecting multiple masks and wafers. The Theta 2139 includes advanced features that improve asset performance and accuracy. An optional Multiple Patterned Illumination (MPI) model enables the equipment to adjust the image capture to specific patterns, enabling further detection of potential defects. In addition, the system includes an automated wafer alignment feature which allows for quick and accurate location of the inspection object. The optics of the unit make use of advanced technology, ensuring the highest quality of imaging. The machine is designed with a total internal reflectance (TIR) mode, which provides high-quality imaging in the presence of diverse reflectivity. It also uses a brightfield mode which allows for the detection of more delicate defects. The Theta 2139 tool is designed with a wide range of other features and options, including data collection and reporting capabilities and a full suite of software tools to enable the asset to be tailored to the application. The user-friendly graphical interface further simplifies the operation and set-up of the model, allowing users to get up and running quickly. The Theta 2139 is a highly advanced and complex mask and wafer inspection equipment. It offers unprecedented inspection functionality and repeatability, as well as automated wafer handling and alignment, multiple pattern illumination, and highly efficient optics for quality imaging. With its wide range of features and options, the Theta 2139 provides the highest-quality output for effective defect detection and analysis.
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