Used KOKUSAI VR-120A #9148334 for sale

KOKUSAI VR-120A is a comprehensive multi-sensor mask and wafer inspection equipment designed for the production of advanced single layer or multi-layer masks and wafer patterned structures. Its advanced vision technology and advanced illumination systems provide unmatched resolution and inspection coverage. The system includes a high resolution LED digital camera unit, a high speed scanning narrow infrared beam sensor and a fully automated defect inspection machine. The camera tool uses a CCD (charge-coupled device) image sensor and provides resolution up to 8.5 μm-pixels. It offers image capture at up to 200 fields per second. The narrow infrared beam sensor provides sub-micron resolution and can inspect up to 5 million patterns per second. It includes an in-situ focus control asset for reliable defect inspection. The model offers a comprehensive pattern detection and defect detection capability. Pattern recognition functions include measurement of patterns, line widths, layer thickness, surface area, step heights and angles, as well as CD (critical dimensional) and luminescence inspections. Defect detection functions include pore area, resist residues, bridge samples, scratches, contaminants, crystal defect, chip etching and photoresist development. The equipment is capable of inspecting the entire mask or wafer with an optical field of view of 10 cm x 10 cm. It features an integrated Stage Gantry System and an automated stage shifting unit that enables inspection of large mask and wafer areas quickly and accurately. The machine supports manual, semi-automatic and fully automated operation and provides near real-time results. The tool is designed for reliable operation in harsh production environments. It is equipped with a powerful CPU module, an easy to use graphical user interface, a network port and optional memory expansion, and a multiple user authentication asset to ensure secure operation. Furthermore, optional seaming inspection technology and a mask image library enables precise defect revisiting. VR-120A mask and wafer inspection model provides reliable and accurate inspection results in production environments. Its comprehensive defect detection and pattern recognition functions make it ideal for advanced mask and wafer production processes.