Used LEITZ Ergolux #131146 for sale

LEITZ Ergolux is a leader in mask and wafer inspection systems. The equipment is designed for accurate, high-throughput inspection of masks and wafers for defects, including particles, scratches, asperities, and small features. The system features advanced scanning algorithms for enhanced inspection accuracy and speed, as well as high resolution imaging for fine-structure imaging, such as contact holes, openings, and vias. The unit uses a single, light-sensitive imaging head to reduce complexity and ensure optimal performance. The imaging head is equipped with an array of segmented linear photodiode sensors, and an adjustable optical field of view of up to more than 100mm. This allows the machine to simultaneously scan at high resolution images and quickly search large areas. The tool is equipped with a 10-axis motion control asset that enhances the model's ultra-fine motion capability. The motion control equipment is integrated with a scanning laser system to capture high-quality images and extracts critical information quickly and accurately. The unit is also equipped with an Intelligent Defect Detection (IDD) machine that uses advanced pattern matching algorithms to accurately identify features and potential defects. The tool also features an advanced failure analysis capability that allows users to quickly investigate suspected defects. Ergolux is also an open platform asset. It is programmed using LEITZ toolkit, which gives users the flexibility to develop and customize inspection protocols tailored to their specific process needs. The integrated software also features a powerful graphical user interface that can be used to configure the model, create and manage jobs, develop defect detection policies, and review detailed inspection results. LEITZ Ergolux offers superior throughput with up to 120 wafers per hour, and a high defect detection rate of up to 97%. This equipment offers reliable and accurate performance, making it a great option for any inspection application.