Used MICROMETRIC IMS88M-AL #9256098 for sale
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ID: 9256098
Wafer Size: 6"
Vintage: 2005
Optical CD and overlay measurement system, 6"
Measurement process: Automatic from cassette to cassette
Does not include flat pre-aligner
3 Axis:
Motorized X, Y and Z
Robot autoloader and pre-aligner
Auto focus
Auto illumination
Pattern recognition and vision-based measurements
Measurement specifications:
Overlay patterns
Box-in-box
Multi-bar patterns
L-Patterns
Overlay measurement accuracy (TIS): <0.010 um
Overlay measurement repeatability (3σ): <0.010 um
Line width measurement accuracy: 0.010 Micron
Line width measurement repeatability (3σ): 0.006 Micron
Motorized X,Y positioning stage
X,Y Stage travel: 8" x 8"
X,Y Stage velocity: 200 mm/sec
X,Y Positioning accuracy (Per axis): 2.0 microns over full travel
X,Y-Positioning resolution: 0.01 micron
Z Stage travel: 0.1" (2.5 mm)
Z-Positioning resolution: 0.01 micron
Robotic wafer loader and pre-aligner: 4"-8" Wafers
Dual cassettes
Loader / Unloader
Industrial rack-mounted computer
CPU Pentium IV 2.4 GHz
Hard Disk Drive (HDD): 100 GB
CD-ROM Drive
Ethernet communication
VGA Display
Keyboard and mouse
Operating system: Windows 2000
Computer vision system
CCD Camera
Frame grabber board
Microscope optical system:
High precision line width measurement
Vertical illuminator
Parfocal objectives: 10x BF and 100x BF
Monocular photo-tube with CCTV adapter
Computer controlled Illumination system
With 125 quartz-halogen lamp and fiber bundle
Glass-scale linear encoders
Resolution: 0.01 micron
Point-to-point measurements:
Edge detection
Intersections
Center lines
Circle centers and centroids
Option:
X-Y Grid plate calibration
7" x 7" With 140 mm x 140 mm grid
Temperature controlled chamber
Temperature controlled range: ±0.25°C
2005 vintage.
MICROMETRIC IMS88M-AL Mask and Wafer Inspection Equipment offers a reliable, automated system for detecting mark and/or wafer defects. This unit is equipped with a two-headed optical microscope with a long working distance, allowing for the observation of large samples. The optical microscope can be adapted for different image sizes, enabling the user to inspect everything from small semiconductor substrates to larger optical and photovoltaic devices. The machine includes several other components and hardware that can help in both inspection and analysis. An automated focus motor provides precise, rapid adjustment of the wafer under investigation. The motor features a resolution less than two microns, allowing for accurate scanning of the wafer. A digital image capture camera further enhances the accuracy of the inspection process, with a very low pixel size and up to 28 frames per second to capture all defects. The tool is further equipped with a laser tool that can measure features down to the nanometer level. This is combined with a very high level of accuracy, making the asset ideal for projects that require accuracy and precision. The model also includes a variety of software that further enhance the inspection process. This includes a variety of image processing methods such as optical character recognition (OCR), pattern recognition, statistical methods, and many other image analysis methods. These can be used to rapidly identify and classify defects, areas of contamination, or other features of interest. The software also provides powerful data visualization and analysis capabilities to evaluate the condition of the mask or wafer sample. The equipment is able to generate a variety of useful outputs, including images, inspection maps, measurements, and detection results. The graphical user interface also allows the user to quickly and easily set up the system and program it for a variety of tasks. This makes the unit ideal for quick and easy inspection and analysis of various types of materials. IMS88M-AL offers a reliable and effective way to detect mark and/or wafer defects with a low cost of ownership. With its robust construction, reliable hardware, and powerful accompanying software, this machine is ideal for quick and accurate inspection and analysis tasks.
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