Used MKS GLM-2000 #9073496 for sale
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ID: 9073496
Minority Carrier Lifetime Monitor
Measurements:
Gtau (lifetime)
Photoconductance Rise (PCR)
Photoconductance Decay (PCD)
Sheet Resistance
Gtau Lifetime Measurement Range: 0.2-15,000 microsecond (µsec) equivalence
PCR and PCD Measurement Range: 5-15,000 µsec
Sheet Resistance Range: 1 5-1000 Ohm o
Within Specification Temperature: 18º - 28°C ambient
Substrate Size: 2”, 3”, 4”, 6” diameter, 156 x 156 mm
LED Light Source2: Near Infrared (940 nm) or Green (527 nm)
Sensor Measurement Area: 940mm2, spatially averaged illumination
Substrate Thickness: <1.1 mm (<2.0 mm with tray removed)
Power: 110-240 VAC, 50/60 Hz.
MKS GLM-2000 is a powerful mask and wafer inspection equipment designed to detect manufacturing defects. The inspection system provides automated defect inspection for photomasks, flat panel displays, and MEMS devices. The inspection unit is equipped with a high resolution optical machine, advanced illumination techniques, and a unique viewing tool that enable it to detect even the most subtle surface irregularities. GLM-2000 is designed to support a wide range of inspection applications including dielectric measurement, critical dimension inspection, global alignment, and design rule/mask rule verification. MKS GLM-2000 is equipped with an advanced view technology, which allows the asset to quickly access obscure features in a pattern or detect defects with high contrast or resolution. The scanning stages used in GLM-2000 are capable of high speed movement and high accuracy positioning, allowing for accurate and reliable defect inspection. The model provides a number of different detection techniques, such as multi-focus, 3D-dipole, and multi-angle light reflection. The equipment also features powerful image processing algorithms for advanced edge detection, feature measurement, and image comparison. MKS GLM-2000 is capable of inspecting up to 10 masks and wafers in a single cycle. The system is highly configurable and can be tailored to meet the needs of a wide range of manufacturing processes. GLM-2000 is designed to meet the requirements of manufacturers who are produce in mass quantities and require high volume inspections. The unit has a low malfunction rate, which ensures that the machine is always reliable and accurate. MKS GLM-2000 is a user-friendly and efficient inspection tool. The intuitive user interface and graphical user interface make it easy to operate. The inspection asset is compliant with a variety of industry standards, including CD-SEMI, J-STD, and IEC-60950. The model is designed to provide efficient and reliable defect detection in a variety of industries, including fabrication, imaging, and metrology. GLM-2000 is a cost effective inspection equipment, providing unbeatable accuracy and throughput.
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