Used NANOMETRICS / BIO-RAD / ACCENT CALIPER Q300 #9294762 for sale
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ID: 9294762
Wafer Size: 12"
Vintage: 2003
Overlay measurement system, 12"
2003 vintage.
NANOMETRICS / BIO-RAD / ACCENT CALIPER Q300 is a highly advanced and comprehensive mask and wafer inspection equipment. It provides accurate, automated, and consistent inspection of critical lithographic mask and wafer components used in the manufacturing of a variety of electronic devices. The system consists of a lens inspection table (LIT), a stepper unit to control the lenses on the LIT, an Optics Station (OS) which includes three separate optical systems, a Programmable Alignment Modular Magnifier (PAMM) microscope, an Inspection Performance station with high resolution digital imaging camera, and a Robotic Arm (RA) optimized for mandrel loading, proximity sensing, and precision alignment of parts. The LIT is a precision transport table with adjustable and locked tolerances embedded into its surface for ensuring that all optical components on the platform remain in the same position during the entire inspection cycle. This allows the machine to provide a uniform result regardless of any distortion introduced by differences in the lens alignment parameters. The OS is responsible for the optical transport of the mask and wafer components. It consists of a space- and power-efficient optical design that provides maximum resolution through a variety of magnifications. It houses three separate optical systems, the PAMM, and the inspection performance station, allowing for simultaneous inspections and more accurate point measurements. The PAMM is a microscope equipped with advanced sensing and image analysis capabilities. Its automated feature extraction algorithms identify and analyze mask and wafer features such as line width, pitch, or other critical dimensions that need to be measured. The Inspection Performance station uses a high resolution digital imaging camera to capture and store images of the mask and wafer components during the inspection process. The camera ensures accurate uniformity across the mask and wafer surfaces and allows uniformity measurements to be made quickly and accurately. The RA is an intelligent robotic arm used for loading and automatically positioning the wafer and mask components for the most accurate measurements possible. It also enables the tool to process a wafer in a single step, increasing the process speed and efficiency. ACCENT CALIPER Q300 is an advanced and effective instrument when it comes to mask and wafer inspection. Its precise optics systems, combined with the PAMM microscope, high resolution digital camera, and Robotic Arm provide consistent inspection results of the most intricate components used in the manufacture of electronic devices.
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