Used NANOMETRICS / BIO-RAD / ACCENT Q200i #9183432 for sale
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ID: 9183432
Overlay measurement system, 8"
Hardware configuration:
Main system:
Main body
PC Control console
SMIF System: (2) Indexers
Handler system:
Robot unit
Prealigner
CIM Linked
2000 vintage.
NANOMETRICS / BIO-RAD / ACCENT Q200i is an advanced and reliable mask and wafer inspection equipment. The system is designed for high-volume production lines and provides fast and accurate results. It offers scanning capabilities up to 400mm wafer size and a wide range of inspection options from pixel-level to line/space layout. The basic unit unit consists of the main sensor stage, sample stage, computer and peripherals, and control software. The main sensor stage is equipped with a 5MP CCD camera that offers a superior 6μm pixel size, allowing for precise registration of the wafer and mask defects. The sample stage is a motorized stage with a closed-loop motion control machine, providing up to 350mm/sec scanning speed and an X-Y travel of 400mm x 400mm. ACCENT Q200i control software harnesses the power of the camera, stages, and other hardware components to perform automated image analysis. It works in conjunction with several intelligent algorithms to quickly detect lithography-related defects and other complex patterns. Furthermore, it also features a dicing and stitching tool for performing multiple wafer inspection, and a data graphical user interface for displaying the results of the inspection. The asset is also compatible with several third-party pattern recognition software, providing accurate results and an efficient inspection workflow. It is also designed to be easy to install and requires minimal user intervention during operation. Additionally, its advanced autofocus model, remote monitoring, and optional built-in background noise cancellation hardware are designed to ensure maximum accuracy and reliability. In conclusion, BIO-RAD Q200i is a powerful, efficient, and reliable mask and wafer inspection equipment for high-volume production lines. The system is equipped with a 5MP CCD camera, motorized sample stage, and various other components and intelligent algorithms for performing precise image analysis and detecting complex lithography-related defects. Furthermore, it is easy to install and offers a variety of third-party pattern recognition software options for an efficient inspection workflow.
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