Used NANOMETRICS NanoSpec 5100 #9223293 for sale
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ID: 9223293
Wafer Size: 6"
Vintage: 1996
Thickness measurement system, 6"
Measurement wave (UV): 400 - 900
Source: Halogen lamp
Measurement time (sec): 5 (UV:7)
Measurement area (A): 100(40) – 75 μ
Auto focus: Edge detect
1996 vintage.
NANOMETRICS NanoSpec 5100 is a highly advanced mask and wafer inspection equipment that combines high resolution imaging and sensitive defect detection capabilities to check for any irregularities in integrated circuits. The system enables users to accurately measure and monitor the properties of wafer and mask surfaces, from the nanometer to the millimeter size range. NanoSpec 5100 features a state-of-the-art dual beam confocal microscope that provides high resolution imaging, allowing users to inspect features in detail and detect defects. The unit utilizes a high-speed, reliable laser scanning machine to acquire images of wafer and mask surfaces in both reflective and fluorescent modes. The tool offers advanced, automated image analysis tools that enable rapid defect classification and quantification, as well as data manipulation, visualization, and reporting capabilities. NANOMETRICS NanoSpec 5100 also features an advanced pattern recognition asset that enables it to perform automated defect location and analysis classifications. The model is capable of accurately measuring various morphological and electrical characteristics, such as line widths, spaces, and overlaps. It is equipped with a powerful software package for data acquisition and analysis, allowing users to quickly process large datasets and draw accurate conclusions from the measurements. NanoSpec 5100 also provides users with a comprehensive set of quantitative metrology capabilities, including particle sizing, surface roughness and topography measurements, voltage contrast imaging, and corner sharpness monitoring. In addition, it also offers an automated feature recognition equipment that can precisely identify PMOS, NMOS, and MIS transistors. NANOMETRICS NanoSpec 5100 is a powerful and reliable mask and wafer inspection system that provides users with the tools needed to accurately identify and assess any potential defects in integrated circuits. With its high resolution imaging, automation and advanced data analysis capabilities, NanoSpec 5100 is an ideal tool for quality assurance in the fabrication process.
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