Used NANOMETRICS NanoSpec 6100 #293768860 for sale
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NANOMETRICS NanoSpec 6100 is a mask and wafer inspection equipment designed for high accuracy, flexibility and speed. It is optimized to identify yield-critical defects in advanced semiconductor devices quickly and accurately. The system is equipped with a 5-axis imaging head with an extended depth of field lens to image full wafers up to 200 mm in diameter. It features an advanced pattern enhancement unit that eliminates non-uniformity and non-linearity effects from site to site. NanoSpec 6100 provides superior hotspot detection for lithography-induced defects with its high-resolution, color- tuning CCD camera and full-wafer statistical analysis. The high-accuracy stage can image up to 4 shots per wafer for quick visualization and statistical analysis of defects. It features contour and edge interpretation and CD measurement capabilities to detect and analyze CD non-uniformity and other yield-critical defect types. The machine is also capable of performing easy defect isolation with its colorized imaging technique. NANOMETRICS NanoSpec 6100 is built on a modular, open-architecture platform compatible with a range of inspection strategies, technologies, and different programming languages. It offers a wide variety of user options for customization, image buffering, and field separations. It is designed to integrate with other NanoSpec tools and with external metrology systems for an end-to-end defect characterization solution. A state-of-the-art imaging and metrology environment is also available to user with features such as a wide variety of image processing parameters, customizable color palettes, and predefined yield optimization task execution and analysis tools. The tool also features easy-to-use programming and setup tools, including WYSIWYG programming capabilities and graphical representation of tested geometries for easier operation. NanoSpec 6100 is a robust, reliable, and flexible tool for efficient mask and wafer inspection. Its advanced imaging and pattern recognition capabilities, advanced CD measurement and edge interpretation features, and user-friendly interface make this asset an invaluable tool for mask- and wafer-level defect analysis in semiconductor manufacturing processes.
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